Chemical filter system "Risoguard 12"
Chemical filter system for high-end semiconductor exposure equipment, such as ArF liquid immersion lithography.
"RisoGuard 12" is a high-efficiency chemical filter system with HEPA filters developed for high-end semiconductor exposure equipment, including ArF immersion lithography, designed for the removal of acidic, basic, and condensable organic gases. It is equipped with 12 LPS filters or BSMmax filters and 6 HEPA filters within the cabinet. It demonstrates high contaminant removal performance even in low-concentration environments, making it ideal for processes that require a clean environment and for preventing performance degradation due to contamination of optical components. 【Features】 - Long lifespan (equipped with LPS or BSMmax filters) - Space-saving - Low cost (filter recycling through the Refill program) For more details, please download the catalog or contact us.
- Company：日本ドナルドソン
- Price：Other
